• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The object is to create a slide valve in such a way that two contiguous and mutually perpendicular surfaces of a valve plate housing frame can be connected to two mutually perpendicular side walls of a chamber, and in such a way that the connected surfaces are in contact with the side surfaces. Solution: When screwing a fastening screw (18) vertically through a screw insertion hole into a frame wall (4a) of a valve plate housing frame (4) of a slide valve (3) into a screw hole (15) which is located in a chamber wall (2a) of a chamber (1) is formed, and when tightening the fastening screw (18) in order to press the frame wall (4a) against and on the first chamber wall (2a) and fasten it, is carried out by means of a driver mechanism (19) which is attached to the fastening screw (18) and is formed in the screw insertion hole generates a thrust force in a direction perpendicular to the screw axis of the fastening screw (18) on the valve plate housing frame (4), whereby the other frame wall (4b) of the valve plate housing frame (4) by the thrust force against the other chamber wall ( 2b) the chamber (1) is pressed and fastened.
    公开号:CH710724B1
    申请号:CH00179/16
    申请日:2016-02-11
    公开日:2021-07-15
    发明作者:Ishigaki Tsuneo；Shimoda Hiromi；Nagao Takashi
    申请人:Smc Corp Katsunori Maruyama；
    IPC主号:
    专利说明:

    The present invention relates to a slide valve which can be fastened to a chamber wall of a vacuum chamber in a semiconductor processing device and which can open and close an opening which is formed in the chamber wall by means of a valve plate.
    In a semiconductor processing apparatus, a shut-off valve is used to open and close an opening communicating with a vacuum chamber. This semiconductor processing apparatus is very expensive, so processing accuracy is required and maintenance is indispensable. In the maintenance, works such as removing the gate valve from a vacuum chamber and replacing a worn gate valve and a worn sealing member and the like are performed. The part of the vacuum chamber to which the slider is attached and its surroundings are very complicated. Therefore, in recent years, a gate valve having a structure as described in Patent Literature 1 has been used so that removal and reattachment of the gate valve, replacement of a valve plate, and the like can be performed as easily and quickly as possible.
    This known shut-off valve is designed such that a closing arrangement by bringing together a valve plate (closure plate), which the opening (through hole) of a valve plate housing frame (housing-like element), which houses the valve plate, via a valve stem (piston rod), which is connected to the valve plate and by means of a drive mechanism part (cylinder unit), which drives the opening and closing of the valve plate via the valve stem, opens and closes, the closing arrangement by attaching the valve plate housing frame to a side wall of the chamber with a Fastening screw, is detachably connected to the vacuum chamber, and the opening which communicates with the valve plate housing frame is opened and closed by means of the valve plate.Thus, by removing the entire closure assembly from the vacuum chamber during maintenance, replacement of the valve plate and sealing members and the like can easily be carried out.
    PTL 1: Japanese Patent No .: 4210391
    In the known slide valves, it is necessary, when fastening the valve plate housing frame to a side wall of a chamber by means of a fastening screw, to bring two contiguous and mutually perpendicular surfaces of the valve plate housing frame into contact with two mutually perpendicular side walls of the chamber . For this reason, in this gate valve, screw mounting holes for fastening the mounting screw are formed in one of the contiguous surfaces of the valve plate housing frame and in one of the side walls of the chamber so that they are in relation to both the one contiguous surface and the one side wall 45 degrees with the mounting screw screwed into the inclined mounting hole, thereby bringing the two contiguous surfaces of the valve plate housing frame into contact with the two side walls of the chamber.
    However, such a method, in which the valve plate housing frame is attached to a side wall of the chamber with inclined mounting holes, proves to be problematic because it is difficult to achieve the desired positional accuracy in the manufacture of the mounting holes because of the manufacturing a multi-function processing machine must be used, and workpieces must be fixed at an angle, which has disadvantages such as poor machinability and cost.
    It is an object of the present invention to provide a slide valve in which a valve plate housing thereof can be connected to a side wall of a chamber without an inclined fastening screw, with two mutually perpendicular surfaces of the valve plate housing frame in contact with two perpendicular side walls of the chamber lie, and which has a simple and reasonable arrangement structure.
    Solution to problem
    In order to achieve the above object, the present invention provides a slide valve which is fastened in such a way that this connects a first and a second chamber wall of a chamber, which chamber walls are perpendicular to one another, and which by means of a valve plate one in the opening attached to the first chamber wall opens and closes, the slide valve comprising a valve plate housing frame which has a first frame wall which is pressed against the first chamber wall and a second frame wall which is pressed against the second chamber wall, with a communicating opening is mounted in the first frame wall in such a way that it communicates with the opening of the chamber wall, the valve plate being displaceable in the valve plate housing frame, and thereby opening and closing the communicating opening, the slide valve having a drive mechanism section which opens and closes the valve plate bew irkt, and has a fastening device for fastening the valve plate housing frame to the first or second chamber wall, wherein the fastening device comprises a fastening screw which is screwed into a screw hole which is mounted perpendicularly in the first or second chamber wall and which has a screw insertion hole, which is formed vertically in one of the first or second chamber wall and the corresponding frame wall of the valve plate housing frame and through which the fastening screw is guided, a driver mechanism which is formed on the fastening screw and in the screw insertion hole, a thrust force when the fastening screw is tightened the valve plate housing frame, generated in a direction perpendicular to the axis of the fastening screw, in order to press one of the frame walls against the one chamber wall and to fasten it to this, while the other frame wall of the Valve plate housing frame is pressed against the other chamber wall of the chamber by the thrust force.
    According to a particular embodiment of the present invention, the driver mechanism has a driver surface which is designed as a uniformly inclined surface arranged on the fastening screw, and a driver ramp surface which is designed as a uniform inclined surface in the screw insertion hole, the direction of inclination and the angle of inclination of the driving surface and the direction of inclination and the angle of inclination of the driving surface are each equal to one another.In this case, the driver surface lying on a driver element is preferably arranged integrally with or separately from the fastening screw, and the driver contact surface is arranged on the inner surface of the screw insertion hole.The driver element is preferably formed separately from the fastening screw and is fastened to the fastening screw in such a way that the driver element can be rotated relative to the axis of the fastening screw, but is prevented from moving in the direction of the axis.
    According to a specific embodiment of the present invention, both the driving surface and the driving surface are planar. In this case, the driver element preferably has a non-circular front view, the driver surface being formed on the outer surface of the driver element, the screw insertion hole having a driver insertion recess in which the driver element is non-rotatably mounted, and the driver contact surface on the inner surface the driver insertion recess is formed.
    According to a further embodiment of the present invention, the driver surface and the driver ramp surface both have conical surface shapes, and the outer diameter of the widest part of the conical surface, which forms the driver surface, is smaller than the inner diameter of the narrowest part of the conical surface, which forms the driving surface.In this case, it is preferred that the driver element is cylindrical, the conical driver surface being formed on the driver element, wherein the screw insertion hole has a hole section with a small diameter and a hole section with a large diameter, which hole sections are circular and have different diameters, and wherein the conical driver run-up surface lies between the hole section with a small diameter and the hole section with a large diameter.
    According to the present invention, by combining a fastening screw, which is perpendicular to a frame wall of a valve plate housing frame and a chamber wall of a chamber, with a driver mechanism, the valve plate housing frame can be fastened to the chamber wall of the chamber, two being perpendicular to each other standing frame walls of the housing frame of the valve plate are pressed against two mutually perpendicular chamber walls of the chamber.
    Fig. 1 is a partial sectional view of a first embodiment of the present invention showing a state in which a first frame wall of a valve plate housing frame of a slide valve is attached to a first chamber wall of a chamber by means of fastening devices. FIG. 2 shows a side view of FIG. 1 from the right. FIG. 3A shows an enlarged partial view from FIG. 1 and FIG. 3B shows a side view of FIG. 3A from the right. FIG. 4A shows a sectional view of a preliminary state before the fastening screw according to FIG. 3A is tightened, and FIG. 4B shows a side view of FIG. 4A from the right. FIG. 5A is a sectional view showing a state in which the fastening screw is screwed from the provisional state shown in FIG. 4A to an intermediate tightening position, and FIG. 5B is a right side view of FIG. 5A. 6 shows a partial sectional view of a second embodiment of the present invention in a state in which a second frame wall of a valve plate housing frame of a slide valve is fastened to a second chamber wall of a chamber by means of fastening devices. FIG. 7 shows a side view of FIG. 6 from the right. FIG. 8A shows an enlarged partial view from FIG. 6 and FIG. 8B shows a top view of FIG. 8A. FIG. 9A shows a sectional view of a preliminary state before the fastening screw according to FIG. 8A is tightened, and FIG. 9B shows a plan view of FIG. 9A. FIG. 10A is a sectional view showing a state in which the fastening screw is screwed from the provisional state shown in FIG. 9A to an intermediate tightening position, and FIG. 10B is a plan view of FIG. 10A. Fig. 11 shows a modification of the fixing device according to a third embodiment of the present invention and shows a partial sectional view of a state in which a first frame wall of a valve plate housing frame of a slide valve is fixed to a first chamber wall of a chamber by means of the fixing device. FIG. 12 is a partial sectional view showing a preliminary state before the fastening screw is tightened shown in FIG. 11. FIG. 13 is a partial sectional view showing a state in which the fastening screw is screwed from the preliminary state shown in FIG. 12 to an intermediate tightening position. 14 shows a sectional view of a further modification of the fastening device according to a third embodiment.
    1 and 2 show a first embodiment of a slide valve according to the present invention. In the figures, reference numeral 1 designates a vacuum chamber (hereinafter simply referred to as “chamber”) for processing a semiconductor. The reference numeral 2 denotes a chamber wall which surrounds the chamber 1. The reference numeral 3 denotes a slide valve which is attached to the chamber wall 2 of the chamber 1 via a valve plate housing frame 4 located therebetween. The reference number 5 denotes fastening devices for fastening the valve plate housing frame 4 to the chamber wall 2.
    The chamber 1 is a right-angled parallelepiped-shaped chamber which is surrounded by the chamber wall 2, has a longitudinal direction and a transverse direction, and enables various semiconductor processing processes in the evacuated interior. A first chamber wall 2a of the chamber wall 2 located at a longitudinal end of the chamber 1 has a horizontal elongated opening 6 for transferring the semiconductor into and out of the chamber 1, and a second chamber wall (bottom wall) 2b which is perpendicular to the lower end the first chamber wall 2a is connected, has a valve installation hole 7, into which a part of the slide valve 3 is inserted. A third chamber wall (upper wall) 2c, which lies opposite the second chamber wall 2b, forms a cover part that can be opened and closed. With the third chamber wall 2c open, the slide valve 3 is inserted into the chamber 1 and the slide valve 3 is fastened to the first chamber wall 2a by means of the fastening devices 5 via the valve plate housing frame 4 lying in between.
    The slide valve 3 comprises the valve plate housing frame 4, a connection opening 6a which is formed in a first frame wall 4a of the valve plate housing frame 4 to communicate with the opening 6, a valve plate 8 which is in the valve plate housing frame 4 is displaceable to open and close the connection opening 6a and thereby the opening 6 opens and closes, a drive mechanism section 10 which drives the opening and closing of the valve plate 8 via a valve stem 9, and the fastening devices 5, which the valve plate Fasten the housing frame 4 to the chamber wall 2 of the chamber 1. The valve plate housing frame 4, the valve plate 8, the valve stem 9 and the drive mechanism section 10 are integrally constructed as one structure.
    The valve plate housing frame 4 comprises the first frame wall 4a, which lies parallel to the first chamber wall 2a of the chamber 1, and a second frame wall 4b connected perpendicularly to the first frame wall 4a. When the valve plate housing frame 4 is attached to the chamber wall 2 of the chamber 1, the first frame wall 4a is pressed against the inner surface of the first chamber wall 2a of the chamber 1, with a first sealing element 11a arranged therebetween, which surrounds the opening 6 therebetween, and the second frame wall 4b is pressed against the inner surface of the second chamber wall 2b of the chamber 1, with a second sealing element 11b which surrounds the valve mounting hole 7 lying therebetween. The first seal member 11a is attached to the first frame wall 4a, and the second seal member 11b is attached to the second frame wall 4b.
    The second frame wall 4b of the valve plate housing frame 4 is connected to the upper end of the drive mechanism section 10 via a connecting device (not shown).A shaft hole 12 in the second frame wall 4b, through which the valve shaft 9 protrudes, communicates with the chamber 1 and is separated from the atmosphere by a bellows or the like arranged in the drive mechanism section 10.
    As can be clearly seen from Figures 3A, 3B, 4A and 4B, the fastening devices 5 each include a screw hole 15 and a guide hole 16, which in the first chamber wall 2a of the chamber 1 are perpendicular in the chamber wall 2a, a screw insertion hole 17, which lies in the first frame wall 4a of the valve plate housing frame 4 perpendicular to the frame wall 4a, a fastening screw 18 which is screwed through the screw insertion hole 17 into the screw hole 15, and a driver mechanism 19 which consists of a driver surface 20 and a driver ramp surface 21, which are formed on the fixing screw 18 and in the screw insertion hole 17.A plurality of the fastening devices 5 are formed at positions remote from the connection opening 6a of the first frame wall 4a, i.e., at positions close to the second frame wall 4b.
    The screw insertion hole 17 has a slot-like shape which extends in the height direction of the first frame wall 4a, and has a rectangular driver insertion recess 22 at its end, which opens into the chamber 1. Thus, the driver insertion recess 22 is a part of the screw insertion hole 17. In the following description, for convenience of description, the slot-like part is referred to as “screw insertion hole 17” and the rectangular part is referred to as “driver insertion recess 22”.The driver contact surface 21, which is designed as a flat inclined surface, lies on that of the four inner side surfaces of the driver insertion recess 22 which is closest to the second frame wall 4b. The driver contact surface 21 is evenly inclined, so that it gradually approaches the second frame wall 4b towards the open end of the driver insertion recess 22.
    The angle formed between the driver ramp surface 21 and an insertion hole axis L1, which forms the central axis of the screw insertion hole 17, is preferably 45 degrees or less and in particular about 20 to 30 degrees. The angle in the example shown is 25 degrees.
    The fastening screw 18 has, in the order from the distal to the proximal end, along a screw axis L2, which is the central axis of this, a threaded portion 18a on which an external thread is formed, a cylindrical portion 18b on which no external thread is formed is, and a round screw head 18c, in which a hexagon socket 18d is provided for turning the screw.A driver element 23, which has a rectangular shape in front view, is connected to the cylindrical section 18b so as to be rotatable about the screw axis L2, its movement along the screw axis L2 being limited by a locking ring 24. The driver surface 20, which is in contact with the driver ramp surface 21, lies on that of the four outer side surfaces of the driver element 23 which is opposite the driver ramp surface 21 of the driver insertion recess 22. This driving surface 20 is a flat inclined surface and is inclined evenly in the same direction as the driving surface 21, that is, it gradually approaches the screw axis L2 the further it goes in the direction of the distal end of the fastening screw 18. The angle formed between the driver surface 20 and the screw axis L2 is the same as the angle formed between the driver ramp surface 21 and the insertion hole axis L1, and is 25 degrees in the example shown here.
    Due to the driver mechanism 19, which is formed by the driver surface 20 and the driver ramp surface 21, when screwing the fastening screw 18 to fasten the first frame wall 4a to the first chamber wall 2a, in the valve plate housing frame 4, a thrust in a direction perpendicular to the screw axis L2 of the fastening screw 18, and the second frame wall 4b of the valve plate housing frame 4 is pressed against the second chamber wall 2b of the chamber 1 by this thrust force.
    The operation to attach the slide valve 3 to the chamber wall 2 of the chamber 1 by means of the fastening devices 5 is carried out as follows.
    4A and 4B show a preliminary state before the fastening of the valve plate housing frame 4 of the slide valve 3 located in the chamber 1 to the first chamber wall 2a of the chamber 1 by means of the fastening devices 5. This preliminary state is a state at which part of the distal end of the threaded section 18a of the fastening screw 18 is screwed into the screw hole 15, the distal end of the cylindrical section 18b being fitted into the guide hole 16, and the fastening screw 18 thereby temporarily stable on the first chamber wall 2a, but not yet firmly tightened, fastened. At this time, the first seal member 11a and the second seal member 11b are not yet compressed, and therefore the wall surfaces 4c of the first frame wall 4a and the second frame wall 4b of the valve plate housing frame 4 are out of contact with the inner surfaces of the first chamber wall 2a and the second chamber wall 2b of the chamber 1. The driving surface 20 of the driving element 23 is in contact with the driving surface 21 of the driving insertion recess 22 and in a position near the open end of the driving insertion recess 22, the cylindrical section 18b of the fastening screw 18 being in the vicinity of a first end of the hole, which in the longitudinal axis direction is that of the two ends of the screw insertion hole 17 which is closer to the second frame wall 4b.
    When the fastening screw 18 is screwed in further from the preliminary state according to FIG. 4A, the fastening screw 18 moves forward when it is turned, while the driver element 23 moves forward without rotating in the driver insertion recess 22, and the fastening screw 18 comes As shown in FIGS. 5A and 5B, into an intermediate tightening position in which a pressing surface 23a on the distal end of the driver element 23 comes into contact with a pressure surface 22a on the underside of the driver insertion recess 22. In this situation, the driving surface 20 of the driving element 23 presses the driving surface 21 while sliding along the driving surface 21, and therefore a vertical force component acts in a direction perpendicular to the screw axis L2 as a thrust force on the valve plate housing frame 4 the valve plate housing frame 4 is pressed against the second chamber wall 2b of the chamber 1, and the second frame wall 4b is pressed against the second chamber wall 2b while the second sealing member 11b is compressed. In this situation, the wall surface 4c of the second frame wall 4b may be in contact with the inner surface of the second chamber wall 2b, but is preferably separated from the second chamber wall 2b with a small gap between it and the inner surface.
    Due to the movement of the valve plate housing frame 4, the cylindrical portion 18b of the fastening screw 18 is moved in the vicinity of a second, the first hole end 17a of the screw insertion hole 17 opposite, hole end 17b.
    A force component also acts on the valve plate housing frame 4 in a direction parallel to the screw axis L2. As a result of this parallel force component, the valve plate housing frame 4 is also pressed in the direction of the first chamber wall 2a. This parallel force component is smaller than the vertical force component, and therefore the valve plate housing frame 4 is only slightly displaced toward the first chamber wall 2a while the first sealing member 11a is slightly compressed.
    Next, when the fastening screw 18 is screwed in further, and is tightened from the intermediate tightening position shown in FIG. 5A and into a final tightening position as shown in FIGS. 3A and 3B, the valve plate housing frame 4 is in the direction of first chamber wall 2a of the chamber 1, and the first frame wall 4a is pressed against the first chamber wall 2a while the first sealing element 11a is compressed. In this situation, the second frame wall 4b is pressed against the second chamber wall 2b while the second sealing element 11b is compressed, and in this state is displaced along the second chamber wall 2b. The second sealing element 11b is therefore preferably subjected to an anti-stick treatment in order to prevent the second sealing element 11b from adhering to the second chamber wall 2b and / or generating abrasion.
    The wall surface 4c of the first frame wall 4a can be in contact with the inner surface of the first chamber wall 2a or can be separated from the inner surface of the first chamber wall 2a by a small gap therebetween. Nevertheless, and in order to avoid that the first frame wall 4a is displaced by the pressing force when the connection opening 6a is closed by the valve plate 8, the first frame wall 4a is preferably in contact with the first chamber wall 2a. In this case, and in order to minimize the generation of abrasion due to metal contact, advantageously only parts of the wall surface 4c of the first frame wall 4a are in contact with the first chamber wall 2a and the other wall surface part is shaped in the form of a recess so as to be out of contact with the first chamber wall 2a to stand. In this case, the wall surface parts in contact with the first chamber wall 2a are preferably a part of the upper end of the first frame wall 4a, which is on the outside of the first sealing element 11a, and the parts around the screw insert holes 17.
    Thus, by tightening the fastening screws 18 of all fastening devices 5, the fastening of the valve plate housing frame 4 to the chamber wall 2 of the chamber 1, that is to say the fastening of the slide valve 3 in the chamber 1, is completed.
    The removal of the slide valve 3 from the chamber 1 for maintenance or the like can be carried out in a reverse order to the fastening process described above. In this case, because the driver element 23, which is fastened to the fastening screw 18 and is held by the locking ring 24 on the fastening screw 18, the driver element 23 is removed from the driver insertion recess 22 together with the fastening screw 18 when the fastening screw 18 is removed.
    Figs. 6 and 7 show a second embodiment of the present invention. The second embodiment differs from the first embodiment in that a second frame wall 4b of the valve plate housing frame 4 can be fastened to a second chamber wall 2b of a chamber 1 by means of a plurality of fastening devices 5A. For this reason, in the example shown, a fastening device 5A is provided in the longitudinal direction and on each outer side of a valve installation hole 7 formed in the second chamber wall 2b.
    As can be clearly seen from FIGS. 8A, 8B, 9A and 9B, the fastening devices 5A have essentially the same structure as the fastening devices 5 of the first embodiment. That is, the fastening devices 5A each comprise a screw hole 15 and a guide hole 16, which are formed in the second chamber wall 2b of the chamber 1 and perpendicular to the chamber wall 2b, a screw insertion hole 17 which is perpendicular to the frame wall 4b in the second frame wall 4b of the valve plate. Housing frame 4 is formed, a fastening screw 18 which is screwed through the screw insertion hole 17 into the screw hole 15, and a driver mechanism 19 which is fixed to the fastening screw 18 and is located in the screw insertion hole 17.
    The driver mechanism 19 is formed by a driver surface 20, which is formed on one of the outer side surfaces of a driver element 23 which is attached to the fastening screw 18, and a driver run-up surface 21 which is on one of the inner side surfaces of the Driver insertion recess 22 is formed in the screw insertion hole 17. The driver surface 20 and the driver ramp surface 21 are formed on the side surfaces of each of the driver element 23 and the driver insertion recess 22, which are closest to the first frame wall 4a.
    In the second embodiment, the method of fastening the second frame wall 4b of the valve plate housing frame 4 to the second chamber wall 2b of the chamber 1 by means of the fastening devices 5A is substantially the same as that in the case of the first embodiment. This means that the fastening screw 18 is screwed from the preliminary state, as shown in FIGS. 9A and 9B, into an intermediate tightening position in which the pressing surface 23a of the driver element 23 is in contact with the pressure surface 22a on the underside of the driver insertion recess 22, as shown in FIGS. 10A and 10B, and wherein the entrainment surface 20 of the entrainment mechanism 19 presses on the entrainment contact surface 21 in order to move the valve plate housing frame 4 in the direction of the first chamber wall 2a of the chamber 1. The first frame wall 4a is thus pressed against the first chamber wall 2a, the first sealing element 11a being compressed.
    Next, the fastening screw 18 is screwed in further from the intermediate tightening position according to FIGS. 10A and 10B and is tightened to a final tightening position, as shown in FIGS. 8A and 8B, the valve plate housing frame 4 thereby in the direction of the second chamber wall 2b of the chamber 1 is displaced, and the second frame wall 4b is pressed against the second chamber wall 2b, during which the second sealing element 11b is compressed. In this situation, the first frame wall 4a, which is pressed against the first chamber wall 2a, is displaced in this state along the first chamber wall 2a.
    Thus, by tightening the fastening screws 18 of the two fastening devices 5A, the fastening of the valve plate housing frame 4 to the chamber wall 2 of the chamber 1, that is to say the mounting of the slide valve 3 in the chamber 1, is completed. In the second embodiment, in order to reduce the contact area with the first chamber wall 2a, the first frame wall 4a of the valve plate housing frame 4 is formed such that a part around the first seal member 11a is in contact with the first chamber wall 2a and the other part is not in contact with the first chamber wall 2a.
    11 to 13 partially show a modification of a fastening device for a third embodiment of the present invention. This fastening device 5B differs from the fastening devices 5 and 5a of the first and the second embodiment in that inclined surfaces are formed which form a driver surface 35 and a driver ramp surface 36 of a driver mechanism 34 and both have conical surface shapes.
    The arrangement of the fastening device 5B of the third embodiment, in a case in which, as in the case of the first embodiment according to FIGS. 1 and 2, a first frame wall 4a of a valve plate housing frame 4 on a first chamber wall 2a of a chamber 1 is attached by means of the attachment device 5B will be described below. In this case, for the arrangements of the components that do not relate to the fastening device 5B, such as the arrangements of the chamber 1 and the valve plate housing frame 4 not described in FIGS. 11 to 13, reference is made to FIGS. 1 and 1 as required 2 referred to.
    The fastening device 5B comprises a screw hole 31 which is provided perpendicular to the chamber wall 2a in the first chamber wall 2a of the chamber 1, a screw insertion hole 32 which is perpendicular to the frame wall 4a in the first frame wall 4a of the valve plate housing frame 4, a Fixing screw 33 which protrudes through the screw insertion hole 32 and is screwed into the screw hole 31, and a driver mechanism 34 which is formed on the fixing screw 33 and in the screw insertion hole 32.
    The screw insertion hole 32 is here a circular hole and comprises along the insertion hole axis L1 and in the order from the distal to the proximal end of the screw insertion hole 32, a hole section 32a with a small diameter, a hole section 32b with a large diameter, which has a larger hole diameter than that of the hole portion with a small diameter, and a screw head receiving portion 32c, with a larger hole diameter than that of the hole portion 32b with a large diameter. The driver run-up surface 36, which has a conical surface shape, lies between the hole section 32a with a small diameter and the hole section 32b with a large diameter. A seat surface 32d with which the screw head 33c of the fastening screw 33 comes into contact is formed on the bottom of the screw head receiving portion 32c.
    The fastening screw 33 has along the screw axis L2 in the order from the distal to the proximal end, a threaded portion 33a on which an external thread is formed, a cylindrical portion 33b on which no external thread is formed, and the round screw head 33c a hexagon socket. In the cylindrical portion 33b, a large-diameter portion 33b1 is formed on the proximal side (side of the screw head 33c) and a small-diameter portion 33b2 is formed on the distal side (side of the threaded portion 33a), which have different outer diameters. The driving surface 35 having a conical surface shape is formed between the large diameter portion 33b1 and the small diameter portion 33b2.
    The outer diameter of the large diameter portion 33b1 of the fastening screw 33 is smaller than the inner diameter of the large diameter hole portion 32b of the screw insertion hole 32 and is slightly smaller than the inner diameter of the small diameter hole portion 32a, so that the large diameter portion 33b1 can be inserted flush into the small-diameter hole section 32a and without soldering (wobbling). Therefore, the outside diameter of the widest part of the conical surface which forms the driver surface 35 is smaller than the inside diameter of the narrowest part of the conical surface which forms the driver run-on surface 36.
    The method of fixing the first frame wall 4a of the valve plate housing frame 4 to the first chamber wall 2a of the chamber 1 by means of the fixing device 5B of the third embodiment having the arrangement described above is substantially the same as that in the case of the first embodiment .That is, FIG. 12 shows a preliminary state in which a part of the distal end of the threaded portion 33a of the fixing screw 33 is screwed into the screw hole 31 of the screw insertion hole 32 and is temporarily fixed. In this preliminary state, the large-diameter portion 33b1 of the fastening screw 33 lies in the large-diameter hole portion 32b of the screw insertion hole 32, and part of the driver surface 35 is in contact with a part of the driver ramp surface 36, but does not yet press against the driver ramp surface 36. Therefore the first frame wall 4a and the second frame wall 4b of the valve plate housing frame 4 are not in contact with the first chamber wall 2a and the second chamber wall 2b of the chamber 1. Therefore, the insertion hole axis L1 of the screw insertion hole 32 and the screw axis L2 of the fastening screw 33 do not coincide.
    When the fastening screw 33, as shown in FIG. 13, is screwed from the preliminary state according to FIG Part of the driver surface 35, which has a conical surface shape, in contact with a part of the driver ramp surface 36, which has a conical surface shape, and presses against the driver receiving surface 36 when sliding along the driver receiving surface 36, and the hole portion with the large diameter 33b1 is fitted into the small-diameter hole portion 32a. As a result, the valve plate housing frame 4 is pushed toward the second chamber wall 2b by a pushing force in a direction perpendicular to the insertion hole axis L1, and the second frame wall 4b is pressed against the second chamber wall 2b. The insertion hole axis L1 of the screw insertion hole 32 and the screw axis L2 of the fixing screw 33 coincide (coincide).
    Next, when the fastening screw 33 is tightened to a final tightening position as shown in FIG first chamber wall 2a pressed, and the fastening of the valve plate housing frame 4 is completed.
    As with the fastening device 5A of the second embodiment according to FIGS. 6 and 7, the fastening device 5B of the third embodiment can also be used to fasten the second frame wall 4b of the valve plate housing frame 4 to the second chamber wall 2b of the chamber 1 .
    In the fastening device 5B of the third embodiment, a driver surface 35 is formed directly on the cylindrical section 33b of the fastening screw 33. However, as shown in Fig. 14, the follower surface 35 may be formed by attaching a cylindrical follower 37 to the cylindrical portion 33b and forming a part thereof such as the distal end of the follower 37 into a conical surface shape. In this case, the driver piece 37 can be fastened to the fastening screw 33 in a fixed manner or rotatably relative thereto. If the driver piece 37 is rotatable, the driver piece 37, preferably on the fastening screw 33, is fastened with restricted movement in the direction of the screw axis L2, in order to prevent the driver piece 37 from getting caught in the screw insertion hole 32 when the fastening screw 33 is out of the screw insertion hole 32 is removed. It can be said that in the fastening device 5B of the third embodiment, the cylindrical portion 33b of the fastening screw 33 is integrally formed with the driver piece 37.
    In the exemplary embodiments shown, the angle which is formed between the driver surface 20, 35 and the screw axis L2, and the angle which is formed between the driver ramp surface 21, 36 and the insertion hole axis L1, both have an amount of less than 45 Degrees (for example 25 degrees), although these angles can also be 45 degrees. By setting the driver surface 20, 35 and the driver contact surface 21, 36 to 45 degrees, if the fastening screw 18, 33 is tightened and the driver surface 20, 35 presses on the driver contact surface 21, 36, equally strong thrust forces can be generated, which on the driver run-up surface 21, 36, ie act on the valve plate housing frame 4 both in a direction perpendicular to the screw axis L2 and in a direction parallel to the screw axis L2. As a result, the valve plate housing frame 4 can be shifted so that both the first frame wall 4a and the second frame wall 4b approach both the first chamber wall 2a and the second chamber wall 2b of the chamber 1 at the same time. The fastening of the valve plate housing frame 4 to the chamber wall 2 of the chamber 1 can thus be carried out easily and without problems.
    List of reference symbols
    1 chamber 2 chamber wall 2a first chamber wall 2b second chamber wall 3 slide valve 4 valve plate housing frame 4a first frame wall 4b second frame wall 5 fastening devices 5A, 5B fastening device 6 opening 6a connecting opening 7 valve installation hole 8 valve plate 9 valve stem 10 drive mechanism section 11a first sealing element 11b second sealing element 12 shaft hole 15 screw hole 16 guide hole 17 screw insertion hole 18 fastening screw 18a threaded section 18b cylindrical section 18c screw head 18d hexagon socket 19 driver mechanism 20 driver surface 21 driver contact surface 22 driver insertion recess 22a pressure surface 23 driver element 23a contact surface 24 circlip 31 screw hole 32 screw section with small hole 32a Diameter 32b hole section with a large diameter 32c screw head receiving section 32d seat surface 33 fastening screw 33a threaded section 33b cylindrical section itt 33b1 section with large diameter 33b2 section with small diameter 33c screw head 34 driver mechanism 35 driver surface 36 driver ramp surface 37 driver piece L1 insertion hole axis L2 screw axis
    权利要求:
    Claims (8)
    [1]
    1. Slide valve (3) which can be fastened in such a way that in the fastened state it can span a first chamber wall (2a) and a second chamber wall (2b) of a chamber (1), which are vertically connected to one another, and in the fastened state by means of a an opening (6) formed in the first chamber wall (2a) can be opened and closed for the valve plate (8) belonging to the slide valve (3),The slide valve (3) comprises: a valve plate housing frame (4) with a first frame wall (4a) which can be pressed against the first chamber wall (2a) and a second frame wall (4b) which can be pressed against the second chamber wall (2b) is; a connection opening (6a) formed in the first frame wall (4a) to communicate with the opening (6); the valve plate (8), which is displaceable in the valve plate housing frame (4) in order to open and close the connection opening (6a); a drive mechanism section (10) for actuating the valve plate (8) for opening and closing; and a fastening device (5, 5A, 5B) for fastening the valve plate housing frame (4) to the first (2a) or second chamber wall (2b),wherein the fastening device (5, 5A, 5B) comprises a fastening screw (18, 33) which, when the slide valve (3) is fastened to the chamber walls (2a, 2b), is screwed into a screw hole (15, 31) which is perpendicularly in one of the first chamber wall (2a) or second chamber wall (2b) is attached, and a screw insertion hole (17, 32) which is perpendicular in one (4a / 4b) of the first frame wall (4a ) or second frame wall (4b) of the valve plate housing frame (4) is attached, and through which the fastening screw (18, 33) protrudes, and a driver mechanism (19, 34) which is attached to the fastening screw (18, 33) and in Screw insertion hole (17, 32) is formed to generate a thrust force on the valve plate housing frame (4) when the fastening screw (18, 33) is screwed, in a direction which is perpendicularto the axis (L2) of the fastening screw (18, 33), and to press one of the frame walls (4a / 4b) against one of the chamber walls (2a / 2b) and to fasten it, and the other of the frame walls (4b / 4a) of the valve plate housing frame (4) to be pressed against the other of the chamber walls (2b / 2a) of the chamber (1) by the thrust force.
    [2]
    2. Slide valve according to claim 1, characterized in that the driver mechanism (19, 34) comprises a driver surface (20, 35) which is a uniformly inclined inclined surface, and a driver ramp surface (21, 36) which is a uniformly inclined inclined surface which is formed in the screw insertion hole (17, 32), and wherein the inclination direction and the inclination angle of the driving surface (20, 35) and the inclination direction and the inclination angle of the driving surface (21, 36) are respectively equal to each other.
    [3]
    3. Slide valve according to claim 2, characterized in that the driver surface (20, 35) is formed on a driver element (23, 37) which is integrally formed with the fastening screw (18, 33), and wherein the driver contact surface (21, 36 ) is formed on the inner surface of the screw insertion hole (17, 32).
    [4]
    4. Slide valve according to claim 2, characterized in that the driver element (23, 37) is formed separately from the fastening screw (18, 33), and is attached to the fastening screw (18, 33) in such a way that the driver element ( 23, 37) is rotatable about the screw axis (L2) of the fastening screw (18, 33) relative to this, but is restricted in its movement in the direction of the screw axis (L2).
    [5]
    5. Slide valve (3) according to one of claims 2 to 4, characterized in that the driver surface (20) and the driver ramp surface (21) are both planar.
    [6]
    6. Slide valve according to claim 4, characterized in that the driver element (23) from the front view is not circular, and the driver surface (20) is formed on the outer surface of the driver element (23), and the insertion hole (17) has a driver insert - has recess (22) in which the driver element (23) is inserted so that it cannot rotate, and the driver contact surface (21) is formed on the inner surface of the driver insertion recess (22) and the driver surface (20) and the driver contact surface (21) both are planar.
    [7]
    7. Slide valve according to one of claims 2 to 4, wherein the driver surface (35) and the driver ramp surface (36) both have conical surface shapes, and wherein the outer diameter of the largest part of the conical surface which forms the driver surface (35) is smaller than the inner diameter of the narrowest part of the conical surface which forms the driver ramp surface (36).
    [8]
    8. Slide valve according to one of claims 3 or 4, characterized in that the driver element (37) is cylindrical, wherein the conical driver surface (35) is formed on the driver element (37), wherein the screw insertion hole (32) has a hole section with a small diameter ( 32a) and a hole section with a large diameter (32b), both of which are circular and have different diameters, and wherein the conical entrainment surface (36) is formed between the hole section with a small diameter (32a) and the hole section with a large diameter (32b) , wherein the outer diameter of the widest part of the conical surface which forms the driver surface (35) is smaller than the inner diameter of the narrowest part of the conical surface which forms the driver ramp surface (36).
    类似技术:
    公开号 | 公开日 | 专利标题
    AT515492B1|2020-01-15|Actuator for furniture flaps
    WO2004071244A3|2005-02-17|Electromotive linear drive unit
    CH710724B1|2021-07-15|Slide valve.
    EP2941798B1|2018-09-19|Environmentally sealed plug connector housing
    AT402543B|1997-06-25|PISTONLESS PRESSURE CYLINDER
    DE102011001350B3|2012-06-21|Nozzle-device i.e. air nozzle, for use in filling valve of e.g. air-pump, has needle including limiting portion that is limited by external periphery, and chamber exhibiting two widths, where one of widths is smaller than other width
    DE60223345T2|2008-08-28|DIAPHRAGM VALVE WITH COMPRESSIVE SEAL
    DE1928490A1|1970-01-22|Lock nut arrangement
    DE202014007350U1|2014-10-27|Device for adjusting the position of a first movable component relative to a second stationary component
    DE202013002233U1|2014-06-10|Device for position alignment of a front
    EP3538776A1|2019-09-18|Adjusting screw
    DE956957C|1957-01-24|Multi-stage control nozzle
    AT518919B1|2019-04-15|Fitting for a sliding door
    DE3802154C2|1989-12-28|
    EP3309346A1|2018-04-18|Seal with a guided, adjustable trip device
    DE102007045040B3|2009-04-16|Cover device for closing an opening of a container
    DE3824919A1|1989-02-23|Ball valve
    EP2623698A2|2013-08-07|Door actuator with a multi-part housing structure
    DE202010009865U1|2011-10-27|Device for adjusting and locking the position of a guide rail for an adjustable window pane in a vehicle door
    DE2209937C3|1976-01-08|Bellows seal for the rising spindle of a control valve opposite the valve housing
    DE202018106596U1|2019-01-15|Slidable positioning base
    DE202014104103U1|2014-09-29|Floor drain, especially in the bottom of a kitchen sink
    DE102014218684A1|2016-03-17|Device with a hollow shaft and a holder and method for producing such a device
    DE10001264C1|2000-10-19|Appts for the height adjustment of vehicle door hinges with axes on a common line has two lateral rods with screw tool carriers on a guide rod to set both threaded hinge pins simultaneously in a single step
    DE10004670B4|2010-12-09|Pressure shut-off device for a power steering system in the end positions of the steering rash
    同族专利:
    公开号 | 公开日
    JP6485689B2|2019-03-20|
    DE102016102206A1|2016-08-18|
    US10253889B2|2019-04-09|
    JP2016148404A|2016-08-18|
    US20160238150A1|2016-08-18|
    TW201641855A|2016-12-01|
    TWI673449B|2019-10-01|
    CN105889622A|2016-08-24|
    KR20160099486A|2016-08-22|
    CH710724A2|2016-08-15|
    CN105889622B|2019-05-10|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US769831A|1903-11-02|1904-09-13|John Edward Lewis Ogden|Securing valve-seats.|
    US2862040A|1956-01-23|1958-11-25|Louis J Curran|Moisture-proof flanged hub type connector|
    US4573616A|1982-05-24|1986-03-04|Flo-Con Systems, Inc.|Valve, clamp, refractory and method|
    US4556157A|1982-05-24|1985-12-03|Flo-Con Systems, Inc.|Pressure fluid teeming valve and method|
    JPH07450B2|1984-08-07|1995-01-11|日本電装株式会社|Automotive air conditioner|
    JPS6145612A|1984-08-10|1986-03-05|Toshiba Corp|Differential amplifier circuit|
    JPS6144017U|1984-08-27|1986-03-24|
    JPS6145612U|1984-08-28|1986-03-26|
    JP2934989B2|1990-12-14|1999-08-16|不可止 浦上|Device that can be adsorbed on a surface and move along it|
    US5141357A|1991-01-09|1992-08-25|Sundstrand Corp.|Misalignment compensating fastener insert|
    US5909867A|1998-05-27|1999-06-08|Vat Holding Ag|Closing assembly for a chamber having a through-opening|
    US6443426B1|1999-07-07|2002-09-03|Arthur Brenes|Slide lock for vacuum valve|
    JP4803541B2|2008-11-18|2011-10-26|Ｓｍｃ株式会社|Gate valve|
    JP5664846B2|2010-05-25|2015-02-04|Smc株式会社|Vacuum valve|
    JP5725783B2|2010-09-30|2015-05-27|株式会社ブイテックス|Valve device|
    JP5798403B2|2011-08-05|2015-10-21|アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ|Communication unit opening and closing device|
    EP3283778B1|2015-04-17|2020-01-15|Enduralock, LLC|Locking fastener with deflectable lock|JP6388182B1|2017-07-25|2018-09-12|Smc株式会社|Gate valve mounting structure|
    JP2019120380A|2018-01-10|2019-07-22|Smc株式会社|Attachment structure of valve plate to valve rod|
    JP2021001613A|2019-06-19|2021-01-07|Smc株式会社|Mounting structure of valve plate to valve rod in gate valve, and gate valve having the mounting structure|
    法律状态:
    2020-02-28| AZW| Rejection (application)|
    2020-05-29| AEN| Modification of the scope of the patent|Free format text: :DIE PATENTANMELDUNG WURDE AUFGRUND DES WEITERBEHANDLUNGSANTRAGS VOM 24.04.2020 REAKTIVIERT. |
    2020-10-30| AZW| Rejection (application)|
    优先权:
    申请号 | 申请日 | 专利标题
    JP2015025685A|JP6485689B2|2015-02-12|2015-02-12|Gate valve|
    [返回顶部]